vacuum handling

The Vertical Bearing Capacity and Settlement Analysis of the Pre-stressed Concrete Pipe Pile Causes of vacuum reduction of condenser of steam turbine and on-line handling

预应力混凝土管桩的承载机理研究及沉降分析汽轮机凝汽器真空度降低的原因及在线处理

Along with the rapid development of integrate circuit ( IC), there is a high requirement of cleanliness and vacuum for the wafer processing environment, in which the wafer handling robot works.

集成电路（IC）产业的快速发展对硅片传输机器人工作环境的洁净度及真空度提出了更高的要求。

Main Products include: large vacuum spreader, warehousing handling spreader, vacuum products.

主要代理产品包括: 大型真空吊具 、 仓储搬运吊具 、 真空产品等.

Analysis and Fault Handling of Frequent Burn-out of Closing Coils for Type VD4 Vacuum Circuit Breaker

VD4型真空断路器合闸线圈烧毁的故障分析

So it is significant to research on the design of magnetic fluid seal and its application on wafer handling robot working in vacuum condition. Firstly, the development and research on wafer handling robot and magnetic fluid seal technology of china and abroad is introduced in this paper.

因此，研究应用于真空硅片传输机器人的磁流体密封技术及设计方法具有重要意义。本文首先分析了国内外硅片传输机器人和磁流体密封技术的发展和研究现状。